Model

UFP1A

UFP1B

UFP1C-L

UFP1C-R

UFP2T-L

UFP2T-R

Table Size(mm)

60×60

45×45

Table Thickness(mm)

20

25

30

-

Travel

coarse adjustment:±6.5mm;fine adjustment:±0.3mm

θx:±3°;θy:±3°

Bearings

Linear slide guide

Crossed-Roller Bearings

Crossed-Roller Ring

Actuators

micrometer

Weight(Kg)

0.28

0.32

0.4

0.64

Sensitivity

coarse adjustment:≤10µm;fine adjustment≤0.5µm

θx:≤25.2″;θy:≤23.4″

Static parallelism

≤60µm

-

Motion parallelism

≤10µm

-

Motion straightness

≤3µm

-

Load(Kg)

5

5

5

1.5