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Optional Versions ? |
Default |
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.NM version, non-magnetic; .HV version, high vacuum; .UHV version, compatible with 2E-11 mbar |
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1 Bottom size * height |
180 mm × 150 mm × 20 mm |
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2 Main Material |
Aluminum alloy |
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3 Hollow perforation |
80 mm × 60 mm |
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4 Travel |
200 um × 200 um |
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5 Closed-loop resolution |
< 1nm |
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6 Maximum load |
500 g |
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7 Closed-loop sensors |
Capacitive |
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8 Capacitance accuracy |
0.3 nm |
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9 Piezoelectric capacitance (X, Y) |
6.5 uF |
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10 Operating temperature |
15 – 40 °C |
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11 Quality |
1 kg |
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12 Installation |
Automatic compatibility of threaded holes Carrier.L7550.XY
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